Ionization Sensor
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An ionization sensor is introduced by a sealed gas-filled tube with two flat electrodes inside the tube. The tube is placed between two plates that are connected to a source of radio-frequency voltage. This voltage is high enough to develop a glow discharge inside the tube. The difference in potentials between the two electrodes is developed due to the space potential inside the tube and also the potential produced by the capacitive coupling between the outside plates and electrodes. When the tube is placed in the middle between the plates, the potential between the electrodes is zero. A displacement of the tube from the central position creates a potential proportional to the displacement.
Ionization sensor, f = displacement, Uex = radio-frequency voltage, 1 = sealed gas-filled tube, 2 and 3 = flat electrodes, 4 and 5 = plates.
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