Piezoresistive Accelerometer
Print Overview
A piezoresistive accelerometer incorporates a crystal semiconductor beam that works as a spring element. The crystal carries a seismic mass. Several strain-sensitive gages are placed in the crystal's body, and they are physically an integral part of the beam. The gages are usually connected in a Wheatstone bridge. In a similar version, a spring element is made of metal or ceramic material, and semiconductor strips are bonded on the deforming surfaces of the element, similar to the foil or wire gages. The deflection of the spring element under the acceleration causes deformation of the gages, producing an electrical output.
Piezoresistive accelerometers with diffused (a) and cemented (b) semiconductor strain gages, a = acceleration, 1 = seismic mass, 2 = semiconductor beam, 3 = ceramic or metal beam, 4, 5, 6, and 7 = diffused semiconductors, 8, 9, 10, and 11 = cemented semiconductor strips, 12 = case.
Buy the Book
Purchase Transducers and Their Elements from Prentice Hall.
Reader Comments | Submit a comment »
Legal
Excerpt from the book published by Prentice Hall Professional (http://www.phptr.com).
Copyright Prentice Hall Inc., A Pearson Education Company, Upper Saddle River, New Jersey 07458.
This material is protected under the copyright laws of the U.S. and other countries and any uses not in conformity with the copyright laws are prohibited, including but not limited to reproduction, DOWNLOADING, duplication, adaptation and transmission or broadcast by any media, devices or processes.