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Publish Date: Oct 19, 2006

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Prototyping Your Semiconductor Wafer Heating Application using NI Motion Assistant

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Table of Contents

  1. Overview
  2. Step 1. Reference Move—Moves the linear stage to its initial starting position by using the find home move type.
  3. Step 2. Straight-Line Move—Moves the wafer placed on the linear stage into the furnace.
  4. Step 3. Measurements—Waits for the specified amount of time for burn-in.
  5. Step 4. Straight-Line Move—Moves the wafer back to its original position.
  6. Step 5. Convert to LabVIEW or C code

Overview

The aim of this application is to move a semiconductor wafer on a linear stage into a furnace and keep it there for a specified burn-in period. After that the wafer is moved out of the furnace and replaced by another one.

 

The system is comprised of a linear stage that has an extended travel length. You can prototype the motion part of this application by creating a script in NI Motion Assistant using the following steps:

Step 1. Reference Move—Moves the linear stage to its initial starting position by using the find home move type.

Insert a Reference Move step to move the linear stage to its initial starting position.

1. Click the Add Step button on the far left side of the application window.
2. Click the Reference Move button.
3. Click the Configure tab on the dialog box at the bottom of the new screen.

o Because this application uses only one axis of motion, click the 1D button.
o Device: Choose the motion controller.
o Units: Select counts (steps).
o Axis: Choose the default Axis 1.

4. Click the Move Constraints tab on the dialog box. For moving a semiconductor wafer, which is not especially delicate, the default values are adequate:

o Profile type: Select Trapezoidal.
o Velocity: Enter 10,000 counts/sec.
o Acceleration: Enter 100,000 counts/sec2.
o Deceleration: Enter 100,000 counts (steps)/sec2.

5. Click the Reference Parameters tab on the dialog box. For this application, a high-precision move is not necessary, so the following default settings are acceptable:

o Reference Type: Home
o Initial Direction: Forward
o Final Direction: Forward
o Edge to stop on: Forward

6. Check the box next to the Reset Position Counters button to reset the position of the move to zero after the reference move.

Step 2. Straight-Line Move—Moves the wafer placed on the linear stage into the furnace.

Insert a Straight-Line Move step. This step prototypes moving the wafer into the furnace.

1. Click the Add Step button on the far left side of the application window.
2. Click the Straight-Line Move button. Motion Assistant remembers the Configure and Move Constraints tab settings of the previous step, so it is necessary to change the settings only in the Position tab.
3. Click the Position tab on the dialog box, and set the following parameters:

o Operation Mode: Absolute Position
o Position: The number of counts (steps) to travel, which equates to distance, varies significantly for each motion system. For this example, enter 60000.

Step 3. Measurements—Waits for the specified amount of time for burn-in.

Insert a Measurements step.

1. Click the Add Step button on the far left side of the application window.
2. Click the Measurements step button.
3. Click the Configure Delay tab on the dialog box, and set the following parameters:

o Type of Delay: Wait for specified time
o Delay: 5000 ms

This step sets a delay of five seconds that the wafer stays in the furnace for burn-in.

Step 4. Straight-Line Move—Moves the wafer back to its original position.

Insert a second Straight-Line Move step. This step prototypes the removal of the wafer from the furnace.

1. Click the Add Step button on the far left side of the application window.
2. Click the Straight-Line Move button. Motion Assistant remembers the Configure and Move Constraints settings from the previous step, so it is necessary to change the settings only in the Position tab.
3. Click the Position tab on the dialog box, and set the following parameters:

o Operation Mode: Absolute Position
o Position: The number of counts (steps) to travel, which equates to distance, varies significantly for each motion system. For this example, enter 0 to return the axis to its starting position.

Step 5. Convert to LabVIEW or C code

You have finished creating the prototype motion script. To test the script, complete the following steps:

1. Initialize the motion controller in MAX.
2. Click the button at the top of the Motion Assistant screen to run the motion script.

Note To run this motion script as written, you must have a complete motion system connected to motors. If you are prototyping a motion script with only a motion controller and no external motion hardware, delete the Reference Move step, configure the motion controller for open-loop steppers, and then run the script.

To save the motion script, select File»Save, or press <Ctrl-S>. You can now convert your project to LabVIEW or C code by clicking on Tools»Generate Code.

Download FREE NI Motion Assistant Evaluation Software

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This tutorial (this "tutorial") was developed by National Instruments ("NI"). Although technical support of this tutorial may be made available by National Instruments, the content in this tutorial may not be completely tested and verified, and NI does not guarantee its quality in any way or that NI will continue to support this content with each new revision of related products and drivers. THIS TUTORIAL IS PROVIDED "AS IS" WITHOUT WARRANTY OF ANY KIND AND SUBJECT TO CERTAIN RESTRICTIONS AS MORE SPECIFICALLY SET FORTH IN NI.COM'S TERMS OF USE (http://ni.com/legal/termsofuse/unitedstates/us/).